Objective Lens
M Plan Apo Series
Mitutoyo의 표준 고정배율 아포크로마틱 대물렌즈 시리즈로, 광범위한 배율과 우수한 색수차 보정, 긴 작동 거리(WD)를 제공합니다.
| 모델명 |
배율 |
NA |
WD (mm) |
초점거리 f (mm) |
해상도 (μm) |
DOF (μm) |
FOV (mm) |
파장 |
비고 |
| M Plan Apo 1× | 1× | 0.025 | 11.0 | 200 | 11.0 | 440 | 4.8×6.4 | VIS | – |
| M Plan Apo 2× | 2× | 0.055 | 34.0 | 100 | 5.0 | 91 | 2.4×3.2 | VIS | – |
| M Plan Apo 5× | 5× | 0.14 | 34.0 | 40 | 2.0 | 14 | 0.96×1.28 | VIS | – |
| M Plan Apo 10× | 10× | 0.28 | 34.0 | 20 | 1.0 | 3.5 | 0.48×0.64 | VIS | – |
| M Plan Apo 20× | 20× | 0.42 | 20.0 | 10 | 0.7 | 1.6 | 0.24×0.32 | VIS | – |
| M Plan Apo 50× | 50× | 0.55 | 13.0 | 4 | 0.5 | 0.9 | 0.10×0.13 | VIS | – |
| M Plan Apo 100× | 100× | 0.70 | 6.0 | 2 | 0.4 | 0.6 | 0.05×0.06 | VIS | – |
M Plan Apo SL Series
SL(Super Long Working Distance) 시리즈는 긴 작동 거리(WD)를 제공하여, 시료와의 간섭을 최소화하며, 반도체 패키지 및 대형 부품 측정 환경에 적합합니다.
| 모델명 | 배율 | NA | WD (mm) | 초점거리 f (mm) | 해상도 (μm) | DOF (μm) | FOV (mm) | 파장 | 비고 |
| M Plan Apo SL 5× | 5× | 0.14 | 40.0 | 40 | 2.0 | 14 | 0.96×1.28 | VIS | Super Long WD |
| M Plan Apo SL 10× | 10× | 0.21 | 30.5 | 20 | 1.0 | 3.5 | 0.48×0.64 | VIS | Super Long WD |
| M Plan Apo SL 20× | 20× | 0.28 | 30.5 | 10 | 0.7 | 1.6 | 0.24×0.32 | VIS | Super Long WD |
M Plan Apo HR Series
HR(High Resolution) 시리즈는 고해상도 관찰에 특화되어 있으며, 일반 Plan Apo보다 더 높은 NA와 짧은 초점거리로 미세 패턴 관찰에 적합합니다.
| 모델명 |
배율 |
NA |
WD (mm) |
초점거리 f (mm) |
해상도 (μm) |
DOF (μm) |
FOV (mm) |
파장 |
비고 |
| M Plan Apo HR 5× | 5× | 0.21 | 25.5 | 40 | 1.3 | 6.2 | 0.96×1.28 | VIS | 고해상도 |
| M Plan Apo HR 10× | 10× | 0.42 | 15.0 | 20 | 0.7 | 1.6 | 0.48×0.64 | VIS | 고해상도 |
| M Plan Apo HR 50× | 50× | 0.75 | 5.2 | 4 | 0.4 | 0.49 | 0.10×0.13 | VIS | 고해상도 |
| M Plan Apo HR 100× | 100× | 0.90 | 1.3 | 2 | 0.3 | 0.34 | 0.05×0.06 | VIS | 고해상도 |
M Plan Apo NIR Series
NIR(Near-Infrared) 시리즈는 근적외선 파장에서 최적화된 성능을 제공하며, 적외선 응용 측정 및 감지에 적합합니다.
| 모델명 |
배율 |
NA |
WD (mm) |
초점거리 f (mm) |
해상도 (μm) |
DOF (μm) |
FOV (mm) |
파장 |
비고 |
| M Plan Apo NIR 5× | 5× | 0.14 | 34.0 | 40 | 2.0 | 14 | 0.96×1.28 | NIR | – |
| M Plan Apo NIR 10× | 10× | 0.28 | 34.0 | 20 | 1.0 | 3.5 | 0.48×0.64 | NIR | – |
| M Plan Apo NIR 20× | 20× | 0.42 | 20.0 | 10 | 0.7 | 1.6 | 0.24×0.32 | NIR | – |
| M Plan Apo NIR 50× | 50× | 0.55 | 13.0 | 4 | 0.5 | 0.9 | 0.10×0.13 | NIR | – |
| M Plan Apo NIR 100× | 100× | 0.70 | 6.0 | 2 | 0.4 | 0.6 | 0.05×0.06 | NIR | – |
M Plan Apo NIR HR Series
NIR HR(Near-Infrared High Resolution) 시리즈는 고해상도 및 근적외선 최적화를 결합하여, NIR 대역의 정밀 계측에 적합합니다.
| 모델명 |
배율 |
NA |
WD (mm) |
초점거리 f (mm) |
해상도 (μm) |
DOF (μm) |
FOV (mm) |
파장 |
비고 |
| M Plan Apo NIR HR 20× | 20× | 0.60 | 12.0 | 10 | 0.46 | 0.8 | 0.33×0.44 | NIR | – |
| M Plan Apo NIR HR 50× | 50× | 0.65 | 10.0 | 4 | 0.40 | 0.7 | 0.13×0.18 | NIR | – |
| M Plan Apo NIR HR 100× | 100× | 0.70 | 10.0 | 2 | 0.40 | 0.6 | 0.07×0.09 | NIR | – |
M Plan Apo NUV Series
NUV(Near-Ultraviolet) 시리즈는 자외선 근처 영역에서의 고정밀 측정을 위해 설계되었으며, 반도체 및 MEMS 분야의 마이크로 구조 분석에 적합합니다.
| 모델명 |
배율 |
NA |
WD (mm) |
초점거리 f (mm) |
해상도 (μm) |
DOF (μm) |
FOV (mm) |
파장 |
비고 |
| M Plan Apo NUV 10× | 10× | 0.28 | 30.5 | 20 | 1.0 | 3.5 | 0.24×0.32 | NUV | – |
| M Plan Apo NUV 20× | 20× | 0.42 | 17.0 | 10 | 0.7 | 1.6 | 0.12×0.16 | NUV | – |
| M Plan Apo NUV 50× | 50× | 0.44 | 15.0 | 4 | 0.6 | 1.4 | 0.048×0.064 | NUV | – |
| M Plan Apo NUV 100× | 100× | 0.50 | 11.0 | 2 | 0.6 | 1.1 | 0.024×0.032 | NUV | – |
M Plan Apo NUV HR Series
NUV HR(Near-Ultraviolet High Resolution) 시리즈는 자외선 대역에서 고해상도 측정이 필요한 정밀 검사에 적합하며, NA가 높고 DOF가 얕은 특성을 가집니다.
| 모델명 |
배율 |
NA |
WD (mm) |
초점거리 f (mm) |
해상도 (μm) |
DOF (μm) |
FOV (mm) |
파장 |
비고 |
| M Plan Apo NUV HR 50× | 50× | 0.65 | 10.0 | 4 | 0.42 | 0.65 | 0.13×0.18 | NUV | – |
M Plan UV Series
M Plan UV 시리즈는 자외선(UV) 영역에서 높은 투과율과 정밀한 측정을 가능하게 하며, 마이크로 패턴 검사나 바이오 샘플 분석 등에 최적화되어 있습니다.
| 모델명 |
배율 |
NA |
WD (mm) |
초점거리 f (mm) |
해상도 (μm) |
DOF (μm) |
FOV (mm) |
파장 |
비고 |
| M Plan UV 10× | 10× | 0.25 | 20.0 | 20.3 | 1.1 | 4.4 | 0.66×0.88 | UV | – |
| M Plan UV 20× | 20× | 0.37 | 15.0 | 10.4 | 0.7 | 2.0 | 0.33×0.44 | UV | – |
| M Plan UV 50× | 50× | 0.41 | 12.0 | 4.2 | 0.7 | 1.6 | 0.13×0.18 | UV | – |
| M Plan UV 80× | 80× | 0.55 | 10.0 | 2.9 | 0.5 | 0.9 | 0.08×0.11 | UV | – |
Microscope
VMU Series
Mitutoyo's VMU series is a compact modular microscope unit ideal for integration into inspection or process equipment.
※ Objectives shown mounted on tubes are optional.
Features
- Small, lightweight microscope unit
- Compatible with infrared optical systems*1
- Custom-order is available to meet the customers' requirements*3
- Can be used with YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) lasers*2
(Suitable for cutting, repair and removing and processing thin-film.)
- Models with enhanced rigidity and performance
- Custom-order is available to meet the customers' requirements*3
WIDE VMU Series
WIDE VMU units are extended field-of-view variants of the VMU series, offering compatibility with a broader range of optical applications and system integrations.
※ Objectives shown mounted on tubes are optional.
Features
- Small, lightweight microscope unit
- Compatible with infrared optical systems*1
- Custom-order is available to meet the customers' requirements*3
- Can be used with YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) lasers*2
(Suitable for cutting, repair and removing and processing thin-film.)
- Models with enhanced rigidity and performance
- Custom-order is available to meet the customers' requirements*3
Specifications
VMU Series
| Model No. |
Code No. |
Mounting Orientation |
Observation |
Tube Lens |
Laser Port |
Suitable Objective |
Applicable Camera |
Main Unit Mass |
| VMU-V | 378-505 | Vertical | Bright-field / Erect image |
Built in 1X (visible - NIR) | — |
M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo | 2/3 inch or smaller | 650 g |
| VMU-H | 378-506 | Horizontal | Bright-field / Inverted image |
Built in 1X (visible - NIR) | — |
M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo | 2/3 inch or smaller | 750 g |
| VMU-LB | 378-513 | Vertical | Bright-field / Erect image |
Built in 1X (NUV - NIR) | YAG laser source (λ: 355/532/1064 nm) |
NIR series, NUV series | 2/3 inch or smaller | 1270 g |
| VMU-L4B | 378-514 | Vertical (rotatable) | Bright-field / Erect image |
Built in 1X (UV - NIR) | YAG laser source (λ: 266/355/532/1064 nm) |
NIR series, NUV series, UV series | 2/3 inch or smaller | 1300 g |
WIDE VMU Series
| Model No. |
Code No. |
Mounting Orientation |
Observation |
Tube Lens |
Image Field |
Suitable Objective |
Applicable Camera |
Main Unit Mass |
| WIDE VMU-HR | 378-519 | Vertical | Bright-field / Erect image |
Built in 1X (visible - NIR) | — |
M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo, NIR series |
Diagonal line length: 30 mm or less | 1400 g |
| WIDE VMU-BDV | 378-517 | Vertical | Bright/Dark-field / Erect image |
Built in 1X (visible) | ø30 mm |
M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo, NIR series |
Diagonal line length: 30 mm or less | 2000 g |
| WIDE VMU-BDH | 378-518 | Horizontal | Bright/Dark-field / Inverted image |
Built in 1X (visible) | ø30 mm |
BD Plan Apo |
Diagonal line length: 30 mm or less | 2150 g |
WLI
Features
- Non-contact high-accuracy fine surface texture measurement is possible through white light interference: 3D shape measurement, 3D roughness measurement
- Height measurement accuracy not dependent on optical magnification
Measurement enabled with high Z-resolution even with low-magnification lens
- High aspect ratio measurement
Supports high aspect ratio shape measurement through detection not dependent on optical-based NA
- High robustness with regard to disturbance vibration
- Compact and lightweight
Specifications
| Model |
554-001
WLI-Unit-003 |
554-002
WLI-Unit-005 |
554-003
WLI-Unit-010 |
| WLI-Unit Sensor Head |
| Cable length (m) | 3 | 5 | 10 |
| Applicable objective lens *Optional selection | WLI Plan Apo series |
| Tube lens magnification | 1X |
| Focal range (f mm) | 100 |
| Scanning mechanism | Mitutoyo Objective Lens Scanner |
| Size/Weight | 108×68×191 mm / 1.7 kg |
| WLI measurement (WLI-Unit-003/005/010 common) |
| Z motion range | 8000 μm |
| Measurement mode | High throughput | Standard | High resolution |
| WLI measurement Z range | 2100 μm | 1900 μm | 1700 μm |
| Throughput @20 μm range | 3.0 s | 4.0 s | 6.0 s |
| Z resolution | 4 nm |
| Z repeatability (σ) | 40 nm |
| WLI-Unit Controller |
| I/F | WLI-Unit sensor head terminal/stop connector/GigaBit Ethernet: 2 ch |
| Rated voltage | AC100〜240 V / 50, 60 Hz |
| Max. power consumption | 20 W |
| Size/Weight | 196×180×108 mm / 2.3 kg |
| Software |
| WLIPAK | WLI-Unit control library (SDK), sample code, WLIPAK Sample GUI |
| WLI-Unit Calibration SW | Pixel calibration |
| Analysis software (recommended option) | MCubeMap |
| Other | Matrox frame grabber/PC separate |
Recommended PC specifications
OS: Windows 10 Pro 64 bit/Windows 11 Pro 64 bit, CPU: Xeon Processor 8 Core (2.0 GHz or above), memory: 8 GB or above, storage: 25 GB or above, optical drive: DVD-ROM drive (for software installation), communication port: RJ-45 × 1 port (EtherNET), extension slots: PCI Express 3.0 × 8 or above
WLI Plan Apo
- New design matching the WLI-Unit
- Ensures long working distance while more compact and lighter-weight (parfocal 60 mm)
- High NA, high resolution
- Plan Apochromat
- Beam splitter and reference mirror mounted inside objective lens
- Interference fringe adjustment mechanism equipped as standard
Lens Specifications
| Model |
N.A. |
W.D. (mm) |
f (mm) |
R (μm) |
Parfocalizing distance (mm) |
FOV (mm)
WLI-Unit |
FOV (mm)
2/3 inch camera |
Applicable tube lens f (mm) |
Mirror tube length
(excluding mounting screws) |
Outermost diameter |
Mounting screws |
Mass (g) |
| WLI Plan Apo 2.5X |
0.14 | 13.0 | 40 | 2.0 | 60 |
2.94×2.25 | 2.64×3.52 | 100 | 47 |
36.4 (excluding interference unit)
58.5 (Max) |
RMS / 20.32 mm ×36 TP | 320 |
| WLI Plan Apo 5X |
0.28 | 8.0 | 20 | 0.98 | 60 |
1.46×1.12 | 1.32×1.76 | 100 | 52 |
40 | RMS / 20.32 mm ×36 TP | 210 |
| WLI Plan Apo 10X |
0.38 | 6.0 | 10 | 0.72 | 60 |
0.73×0.56 | 0.66×0.88 | 100 | 54 |
40 | RMS / 20.32 mm ×36 TP | 220 |
| WLI Plan Apo 25X |
0.50 | 3.6 | 4 | 0.55 | 60 |
0.29×0.22 | 0.26×0.35 | 100 | 57 |
40 | RMS / 20.32 mm ×36 TP | 290 |
| WLI Plan Apo 50X |
0.70 | 2.0 | 2 | 0.39 | 60 |
0.14×0.11 | 0.13×0.18 | 100 | 58 |
40 | RMS / 20.32 mm ×36 TP | 300 |
*Resolution values in the specifications above are calculated based on reference wavelength (λ = 0.55 μm).
